Basic Limitations in Microcircuit Fabrication Technology

by I. E. Sutherland, C. A. Mead, Thomas E. Everhart


Download eBook for Free

FormatFile SizeNotes
PDF file 2.1 MB

Use Adobe Acrobat Reader version 10 or higher for the best experience.


Purchase Print Copy

 FormatList Price Price
Add to Cart Paperback58 pages $20.00 $16.00 20% Web Discount

Discusses some high-leverage research areas in microcircuit fabrication, not now receiving government or private support, where relatively small, advanced research efforts may have substantial payoff. Based on the fact that microcircuit fabrication has reached or almost reached limitations in both size and precision, the study focuses on a number of areas where progress can be made, identifying those adequately covered by existing programs and highlighting those where relatively little work is being done. The authors recommend four important research efforts aimed at: (1) making small devices; (2) measuring the limits of dimensional stability of silicon substrates and mask materials; (3) predicting the optimum feature size, die size, and wafer size, given the constraints of the newly evolving technology; and (4) understanding the system design implications of very-large-scale integrated circuits. "The potential for future capability is truly impressive," say the authors, who believe that the integrated circuit revolution has run only half its course and that a change in microcircuit complexity of four more orders of magnitude is highly probable.

This report is part of the RAND Corporation Report series. The report was a product of the RAND Corporation from 1948 to 1993 that represented the principal publication documenting and transmitting RAND's major research findings and final research.

This document and trademark(s) contained herein are protected by law. This representation of RAND intellectual property is provided for noncommercial use only. Unauthorized posting of this publication online is prohibited; linking directly to this product page is encouraged. Permission is required from RAND to reproduce, or reuse in another form, any of its research documents for commercial purposes. For information on reprint and reuse permissions, please visit

The RAND Corporation is a nonprofit institution that helps improve policy and decisionmaking through research and analysis. RAND's publications do not necessarily reflect the opinions of its research clients and sponsors.